Salt.Mine

siepic_ebeam_pdk

0.4.11

SiEPIC EBeam PDK

A Process Design Kit for Silicon Photonics fabricated using Electron Beam Lithography (UW, ANT, SiEPICfab)

Author: Lukas Chrostowski, Jaspreet Jhoja, Mustafa Hammood, Brett Poulsen, Jonas Flueckiger, Rounak Singh Narde, Chris Zeqin Lu, Nathan Smith, Stefan Preble, Claudio Alarcon-Reyes (GitHub: lukasc-ubc, jaspreetj, mustafacc, bpoulse, jfluecki, rounaksingh, luzeqin, nsmith5, StefanPreble, clalarco)

API version: 0.27

Package link: git+https://github.com/siepic/SiEPIC_EBeam_PDK.git/tags/v0.4.11/klayout

Documentation: https://github.com/siepic/SiEPIC_EBeam_PDK/blob/master/README.md