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	siepic_ebeam_pdk 0.4.29	SiEPIC EBeam PDK A Process Design Kit for Silicon Photonics fabricated using Electron Beam Lithography, at Applied Nanotools (ANT) Author: Lukas Chrostowski, Jaspreet Jhoja, Mustafa Hammood, Brett Poulsen, Jonas Flueckiger, Rounak Singh Narde, Chris Zeqin Lu, Nathan Smith, Stefan Preble, Claudio Alarcon-Reyes (GitHub: lukasc-ubc, jaspreetj, mustafacc, bpoulse, jfluecki, rounaksingh, luzeqin, nsmith5, StefanPreble, clalarco) API version: 0.27 Package link: git+https://github.com/siepic/SiEPIC_EBeam_PDK.git/tags/v0.4.29/klayout Documentation: https://github.com/siepic/SiEPIC_EBeam_PDK/blob/master/README.md

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siepic_ebeam_pdk

0.4.29 SiEPIC EBeam PDK

A Process Design Kit for Silicon Photonics fabricated using Electron Beam Lithography, at Applied Nanotools (ANT)

Author: Lukas Chrostowski, Jaspreet Jhoja, Mustafa Hammood, Brett Poulsen, Jonas Flueckiger, Rounak Singh Narde, Chris Zeqin Lu, Nathan Smith, Stefan Preble, Claudio Alarcon-Reyes (GitHub: lukasc-ubc, jaspreetj, mustafacc, bpoulse, jfluecki, rounaksingh, luzeqin, nsmith5, StefanPreble, clalarco)

API version: 0.27

Package link: git+https://github.com/siepic/SiEPIC_EBeam_PDK.git/tags/v0.4.29/klayout

Documentation: https://github.com/siepic/SiEPIC_EBeam_PDK/blob/master/README.md

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siepic_ebeam_pdk

0.4.29

SiEPIC EBeam PDK