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siepicfab_ebeam_zep_pdk

0.1.3

SiEPICfab EBeam ZEP PDK

A Process Design Kit for Silicon Photonics fabricated using Electron Beam Lithography, using ZEP resist

Author: Lukas Chrostowski, students and colleagues (GitHub: lukasc-ubc)

API version: 0.27

Package link: git+https://github.com/siepic/SiEPICfab_EBeam_ZEP_PDK.git/tags/v0.1.3

Documentation: https://github.com/SiEPIC/SiEPICfab-EBeam-ZEP-PDK